JPH0419393B2 - - Google Patents

Info

Publication number
JPH0419393B2
JPH0419393B2 JP10051084A JP10051084A JPH0419393B2 JP H0419393 B2 JPH0419393 B2 JP H0419393B2 JP 10051084 A JP10051084 A JP 10051084A JP 10051084 A JP10051084 A JP 10051084A JP H0419393 B2 JPH0419393 B2 JP H0419393B2
Authority
JP
Japan
Prior art keywords
pump
rotor
flow region
vacuum
suction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10051084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60247075A (ja
Inventor
Mitsuho Yoneyama
Osami Matsushita
Shinjiro Ueda
Nobuo Tsumaki
Hideaki Kanbara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10051084A priority Critical patent/JPS60247075A/ja
Publication of JPS60247075A publication Critical patent/JPS60247075A/ja
Publication of JPH0419393B2 publication Critical patent/JPH0419393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP10051084A 1984-05-21 1984-05-21 真空ポンプ装置 Granted JPS60247075A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10051084A JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10051084A JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Publications (2)

Publication Number Publication Date
JPS60247075A JPS60247075A (ja) 1985-12-06
JPH0419393B2 true JPH0419393B2 (en]) 1992-03-30

Family

ID=14275943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10051084A Granted JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Country Status (1)

Country Link
JP (1) JPS60247075A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014022A1 (ja) * 2015-07-23 2017-01-26 エドワーズ株式会社 排気システム

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
JP2003343469A (ja) 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵
JP2021161917A (ja) * 2020-03-31 2021-10-11 エドワーズ株式会社 真空ポンプおよび真空ポンプの配管構造部

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014022A1 (ja) * 2015-07-23 2017-01-26 エドワーズ株式会社 排気システム
JP2017025793A (ja) * 2015-07-23 2017-02-02 エドワーズ株式会社 排気システム
CN107709773A (zh) * 2015-07-23 2018-02-16 埃地沃兹日本有限公司 排气系统

Also Published As

Publication number Publication date
JPS60247075A (ja) 1985-12-06

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